IBIC analysis of SiC detectors developed for fusion applications

https://doi.org/10.1016/j.radphyschem.2020.109100Get rights and content

Highlights

  • Radiation hardness of SiC diodes is studied for the detection of 3.5 MeV He ions.

  • The CCE and energy resolution are not degraded for fluences up to 1 × 1011 cm-2.

  • Degradation of the spectrometric properties is observed at fluences ≥ 3 × 1011 cm2.

  • Minority carrier lifetime strongly deteriorate with increasing particle fluence.

Abstract

In this work, we consider a 4H-SiC detector as a plasma diagnostic system for the detection of fusion-born alpha particles in future nuclear fusion reactors. A nuclear microprobe was used to locally irradiate micrometer-sized regions of the detector with 3.5 MeV He ions to fluences from 5 × 109 to 5 × 1011 cm-2. Ion Beam Induced Charge (IBIC) microscopy was employed to study its degradation in Charge Collection Efficiency (CCE) and energy resolution after irradiation. At high reverse-bias voltages, both parameters remain practically unaffected for fluences up to 1 × 1011 cm-2, while a significant deterioration of the spectroscopic performance was observed above 3 × 1011 cm-2. A theoretical drift-diffusion model, in combination with Shockley-Read-Hall recombination statistics, was used to obtain the holes lifetime from the fitting of the experimental CCE values measured at different reverse voltages. Holes lifetime was found to strongly decrease with increasing particle fluence, changing from 57 ns in pristine detectors to 0.2 ns after irradiation with a fluence of 1 × 1011 cm-2.

Introduction

In nuclear fusion plasma devices, fast (i.e. suprathermal) ions generated by heating systems and fusion-born alpha-particles must be kept well confined until they transfer their energy to the background plasma. This is especially important in large future fusion devices such as ITER (International Thermonuclear Experimental Reactor) and DEMO (DEMOnstration Power Station), where even a loss of a small fraction of energetic ions must be prevented (Fasoliet al., 2007). In ITER, the monitoring of escaping 3.5 MeV alphas produced in the deuterium-tritium (D-T) reaction is still a requirement of the outmost importance (Fasoliet al., 2007; Garcia-Munozet al., 2016). In present fusion devices, based on magnetic confinement of deuterium-deuterium (D-D) plasmas, the main diagnostic used to study the velocity-space of the escaping ions is the scintillator-based Fast Ion Loss Detector (FILD) (Garcia-Munozet al., 2009). Although FILD systems are currently used on virtually all large fusion devices worldwide, the foreseen harsh operation conditions of ITER (high neutron, gamma and heat fluxes) (Fasoliet al., 2007) will compromise, or even invalidate, the use of some of the diagnostic and measurement systems that are employed today. For example, if employing FILD, the temperature of the inner side of the probe head, located near the plasma edge, should not exceed the quenching temperature of the scintillator material, which is ~350 °C for most of the relevant scintillator materials (Rodríguez-Ramos et al., 2017).

An attractive alternative for lost-alpha particle monitoring in ITER would be the use of a semiconductor material as the active component of the probe head. Semiconductor-based detectors provide an intrinsic energy resolution by pulse height analysis, which implies that they have to be used in counting mode. They could have an additional advantage from the integration point of view. Indeed, a transmission line for the light delivery from the detection point to the port plug, in the case of a scintillator-based detector, may occupy more space than the electrical signal delivery by cables, in the case of a semiconductor-based system. This would allow installing a larger number of detectors in each poloidal cross section.

Due to its wide bandgap (3.27 eV for the 4H polytype) and large thermal conductivity (3.7 W/cm·K), silicon carbide (SiC) is one of the most attractive semiconductor materials for the development of, e.g., high operating-temperature electronic devices (Palmour et al., 1987). Moreover, because of its high saturated drift velocity (2 × 107 cm/s) and high atomic displacement energy (Ed(Si) = 35 eV, Ed(C) = 22 eV), SiC devices have demonstrated much higher radiation tolerance compared to silicon (Ohshimaet al., 2012). For instance, during gamma-ray irradiation, no significant change in the electrical characteristics of SiC transistors was observed up to 105 Gy, whereas the Si MOSFETs have shown clear degradation (Ohshimaet al., 2012). On the other hand, the decrease in Charge Collection Efficiency (CCE) during irradiation with a 17 MeV proton beam was considerably larger for Si detectors in comparison to SiC Schottky barrier diodes (SBD) (Garcia Lopez et al., 2016). A comprehensive review on the use of SiC as radiation detector can be found in (Nava et al., 2008a).

The behavior of 4H-SiC SBDs against irradiation with alpha particles has been recently studied by Pastuovic et al. (2015). In that work, the detectors were bombarded with 2 and 4 MeV He ions (with the detectors unbiased) and the deep traps created were characterized using Deep Level Transient Spectroscopy (DLTS). A significant degradation of the CCE, studied by the Ion Beam Induced Charge (IBIC) technique (Vittone et al., 2016), was observed for He fluences above 1011 cm-2.

In this paper, we have extended the previous studies, focusing on the possible use of a 4H-SiC pn junction diode (PND) as a plasma diagnostic system for the detection of alpha-born particles, which will be the main product of the D-T fusion reaction in the future ITER reactor. In order to assess the actual response of the detector in realistic operation conditions, the PND was submitted to 3.5 MeV He bombardment, with the detector biased at its usual polarization voltage. In the same way, IBIC analysis was carried out using also 3.5 MeV He to evaluate the degradation of the spectrometric and transport properties of the PND, such as CCE, energy resolution, and the minority-carriers diffusion length. In this preliminary study, both irradiation and the IBIC measurements were performed at room temperature, which has permitted the validation of the device and the employed methodology. Further analysis at high temperature is being performed presently and will be reported in a forthcoming paper.

Section snippets

SiC diode fabrication and electrical characterization

Fig. 1 shows a schematic cross section of the 4H-SiC PND fabricated in the micro/nanofabrication clean room of the IMB-CNM. Basically, the detector consists in a 3 inches 4H-SiC substrate from Si Crystal with a N-type 45 μm thick 4H-SiC epilayer doped at 1.5 × 1015 cm-3 grown in Ascatron. A p+ layer was implanted in the top surface of the epilayer to create a pn junction. The p+ layer was formed by Al implantation performed at 300 °C with a total dose of 8 × 1014cm-2 and a maximum energy of

I-V and C-V measurements of non-irradiated PND

Fig. 5 (a) shows the I-V characteristics near turn-on voltage and for high reverse bias conditions (inset), where the magnitude of the measured current is in the range of the resolution of the experimental set-up. The C-V characteristic of the diode is depicted in Fig. 5 (b), where the estimated error for the measured capacitance values is below 1 pF. From the C-V measurements, the thickness of the depletion region (w) as a function of the applied bias (V) (Fig. 5c) was calculated using the

Conclusions

In this paper, the potential use of 4H-SiC PNDs for the detection of escaping 3.5 MeV He ions in future D-T based fusion reactors is investigated. The results show that, although the minority carriers lifetime decreases rapidly with alpha fluence, the spectroscopic properties, such as CCE and energy resolution, practically do not degrade when the PND operates at the nominal voltage for fluences up to 1 × 1011 cm-2. This behavior is attributed to the presence of a large electric field and the

CRediT authorship contribution statement

M.C. Jiménez-Ramos: Conceptualization, Investigation, Writing - original draft. J. García López: Conceptualization, Methodology, Investigation, Writing - review & editing. A. García Osuna: Formal analysis, Software. M. Rodríguez-Ramos: Software. A. Villalpando Barroso: Software. M. García Muñoz: Formal analysis. E. Andrade: Formal analysis. G. Pellegrini: Conceptualization. S. Otero Ugobono: Formal analysis. P. Godignon: Methodology. J.M. Rafí: Formal analysis, Writing - review & editing. G.

Declaration of competing interest

The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

Acknowledgements

This work was partially funded by the Spanish Ministry of Economy and Competiveness through the Project FIS2015-69362-P (MINECO/FEDER/UE), the Spanish Ministry of Science, Innovation, and Universities through the project RTC-2017-6369-3 (MICINN/FEDER/UE) and the EUROfusion Project CFP-IPH-AWP19-SA-05-CIEMAT-01 (H2020). E. Andrade acknowledges the PASPA-UNAM financial support provided to undertake a sabbatical year and CNA for the invitation to spend his sabbatical in this Institution. G. Rius

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